Micromachining thev naus laus zis yog cov txheej txheem hloov tau yooj yim, uas tuaj yeem tsim cov khoom siv micro nrog cov duab nyuaj. Tsis tas li ntawd, nws tuaj yeem siv rau ntau yam khoom siv. Nws adaptability ua rau nws tshwj xeeb tshaj yog haum rau kev khiav hauj lwm ceev los ntawm lub tswv yim mus rau prototype, manufacturing complex 3D qauv, thiab terative khoom tsim thiab kev loj hlob,
1. Lub cev micromachining tshuab
Laser beam processing: txheej txheem ua haujlwm uas siv lub zog hluav taws xob coj los ntawm laser beam kom tshem tawm cov ntaub ntawv los ntawm cov hlau lossis cov hlau tsis muaj hlau. Nws yog qhov tsim nyog rau cov ntaub ntawv nkig uas tsis tshua muaj hluav taws xob, tab sis nws tuaj yeem siv rau ntau cov ntaub ntawv.
Ion beam ua: ib qho tseem ceeb unconventional manufacturing technology rau micro / nano manufacturing. Nws siv cov ion nrawm nrawm hauv lub tshuab nqus tsev kom tshem tawm, ntxiv lossis hloov cov atoms ntawm qhov chaw ntawm cov khoom.
2. Tshuaj micromachining tshuab
Reactive ion etching (RIE): cov txheej txheem plasma uas cov tshuaj zoo siab los ntawm RF tawm mus rau etch substrates lossis cov yeeb yaj kiab hauv chav tsev qis. Nws yog ib tug synergistic txheej txheem ntawm tshuaj active tshuaj thiab high-zog ion bombardment.
Electrochemical machining (ECM): ib txoj kev tshem cov hlau los ntawm cov txheej txheem electrochemical. Nws feem ntau yog siv rau kev tsim khoom loj thiab ua cov ntaub ntawv nyuaj heev lossis cov ntaub ntawv uas nyuaj rau kev ua tiav los ntawm cov txheej txheem ib txwm ua. Nws siv tsuas yog rau cov khoom siv hluav taws xob. ECM tuaj yeem txiav cov ces kaum me me lossis tsis sib xws, cov kab sib txuas lossis cov kab noj hniav hauv cov hlau tsis tshua muaj zog.
3. Mechanical micromachining tshuab
Pob zeb diamond tig: cov txheej txheem ntawm tig los yog machining precision Cheebtsam nrog lub tshuab dhos lossis derivative tshuab nruab nrog ntuj lossis hluavtaws pob zeb diamond me ntsis.
Pob zeb diamond milling: cov txheej txheem txiav uas tuaj yeem siv los tsim cov aspheric lens array los ntawm kev txiav ncig siv lub pob zeb diamond kheej kheej.
Precision sib tsoo: ib qho abrasive machining uas tso cai rau lub workpiece yuav tsum tau machined rau hauv ib tug zoo nto tiav thiab ib tug heev kam rau ua ntawm 0.0001 ".
Polishing: kev ua abrasive, argon ion beam polishing yog cov txheej txheem ruaj khov, uas yog siv los ua kom tiav cov iav tsom iav thiab kho qhov tsis zoo ntawm cov khoom siv polishing lossis pob zeb diamond tig kho qhov muag. MRF txheej txheem yog thawj qhov kev txiav txim siab polishing txheej txheem. Commercialized thiab siv nyob rau hauv zus tau tej cov aspheric lo ntsiab muag, reflectors, thiab lwm yam.
